Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444530 | Process for fabricating an integrated circuit with a self-aligned contact | Hung-Sheng Chen, Unsoon Kim, Yu Sun, Chi Chang, Mark T. Ramsbey +4 more | 2002-09-03 |
| 6444539 | Method for producing a shallow trench isolation filled with thermal oxide | Yu Sun, Angela T. Hui, Yue-Song He, Mark S. Chang, Chi Chang +1 more | 2002-09-03 |
| 6420224 | Stepper alignment mark formation with dual field oxide process | Mark S. Chang | 2002-07-16 |