Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444530 | Process for fabricating an integrated circuit with a self-aligned contact | Unsoon Kim, Yu Sun, Chi Chang, Mark T. Ramsbey, Mark Randolph +4 more | 2002-09-03 |
| 6444539 | Method for producing a shallow trench isolation filled with thermal oxide | Yu Sun, Angela T. Hui, Yue-Song He, Tatsuya Kajita, Mark S. Chang +1 more | 2002-09-03 |