Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492067 | Removable pellicle for lithographic mask protection and handling | Leonard E. Klebanoff, Daniel J. Rader, Khanh B. Nguyen, Richard H. Stulen | 2002-12-10 |
| 6352803 | Coatings on reflective mask substrates | William M. Tong, John S. Taylor, Pawitter Mangat, Alan Stivers, Patrick G. Kofron +1 more | 2002-03-05 |