Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6410193 | Method and apparatus for a reflective mask that is inspected at a first wavelength and exposed during semiconductor manufacturing at a second wavelength | Edita Tejnil | 2002-06-25 |
| 6352803 | Coatings on reflective mask substrates | William M. Tong, John S. Taylor, Scott D. Hector, Pawitter Mangat, Patrick G. Kofron +1 more | 2002-03-05 |