Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6477898 | Membrane mask stress measurement apparatus and method therefor | Sang In Han | 2002-11-12 |
| 6352803 | Coatings on reflective mask substrates | William M. Tong, John S. Taylor, Scott D. Hector, Alan Stivers, Patrick G. Kofron +1 more | 2002-03-05 |