Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492067 | Removable pellicle for lithographic mask protection and handling | Leonard E. Klebanoff, Scott D. Hector, Khanh B. Nguyen, Richard H. Stulen | 2002-12-10 |
| 6386015 | Apparatus to collect, classify, concentrate, and characterize gas-borne particles | John R. Torczynski, Karl Wally, John E. Brockmann | 2002-05-14 |