Issued Patents 2002
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494096 | Semiconductor physical quantity sensor | Minoru Murata | 2002-12-17 |
| 6450031 | Semiconductor physical quantity sensor | Minoru Murata, Seiki Aoyama, Youko Nakagawa | 2002-09-17 |
| 6450029 | Capacitive physical quantity detection device | Shinji Yoshihara | 2002-09-17 |
| 6444543 | Semiconductor sensor device and method of manufacturing the same | Hiroshige Sugito, Hiroshi Muto, Motoki Ito, Tsuyoshi Fukada | 2002-09-03 |
| 6430999 | Semiconductor physical quantity sensor including frame-shaped beam surrounded by groove | Minoru Murata | 2002-08-13 |
| 6423563 | Method for manufacturing semiconductor dynamic quantity sensor | Tsuyoshi Fukada, Minoru Murata, Yukihiro Takeuchi, Seiki Aoyama | 2002-07-23 |
| 6388279 | Semiconductor substrate manufacturing method, semiconductor pressure sensor and manufacturing method thereof | Toshimasa Yamamoto, Yasutoshi Suzuki, Kenichi Yokoyama, Masakazu Terada, Eishi Kawasaki +1 more | 2002-05-14 |
| 6373093 | Semiconductor memory device and method of manufacturing the same | Tetsuo Fujii, Akira Kuroyanagi | 2002-04-16 |
| 6365458 | Semiconductor memory device and method of manufacturing the same | Tetsuo Fujii, Akira Kuroyanagi | 2002-04-02 |