Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483322 | Capacitive physical quantity sensor | Shigenori Yamauchi | 2002-11-19 |
| 6450031 | Semiconductor physical quantity sensor | Minekazu Sakai, Minoru Murata, Youko Nakagawa | 2002-09-17 |
| 6423563 | Method for manufacturing semiconductor dynamic quantity sensor | Tsuyoshi Fukada, Minekazu Sakai, Minoru Murata, Yukihiro Takeuchi | 2002-07-23 |