Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6501533 | Scanning type exposure apparatus and method | — | 2002-12-31 |
| 6494096 | Semiconductor physical quantity sensor | Minekazu Sakai | 2002-12-17 |
| 6450031 | Semiconductor physical quantity sensor | Minekazu Sakai, Seiki Aoyama, Youko Nakagawa | 2002-09-17 |
| 6448624 | Semiconductor acceleration sensor | Seiichiro Ishio, Kenichi Ao, Yasuki Shimoyama, Tomohito Kunda, Norio Kitao | 2002-09-10 |
| 6430999 | Semiconductor physical quantity sensor including frame-shaped beam surrounded by groove | Minekazu Sakai | 2002-08-13 |
| 6423563 | Method for manufacturing semiconductor dynamic quantity sensor | Tsuyoshi Fukada, Minekazu Sakai, Yukihiro Takeuchi, Seiki Aoyama | 2002-07-23 |