Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6450025 | Micro-heater and airflow sensor using the same | Hiroyuki Wado, Yoshinori Otsuka | 2002-09-17 |
| 6388279 | Semiconductor substrate manufacturing method, semiconductor pressure sensor and manufacturing method thereof | Minekazu Sakai, Toshimasa Yamamoto, Yasutoshi Suzuki, Kenichi Yokoyama, Masakazu Terada +1 more | 2002-05-14 |