Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6388279 | Semiconductor substrate manufacturing method, semiconductor pressure sensor and manufacturing method thereof | Minekazu Sakai, Toshimasa Yamamoto, Yasutoshi Suzuki, Kenichi Yokoyama, Eishi Kawasaki +1 more | 2002-05-14 |