Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465272 | Extreme ultraviolet soft x-ray projection lithographic method and mask devices | Claude L. Davis, Jr., Kenneth Edward Hrdina, Harrie J. Stevens | 2002-10-15 |
| 6375551 | Angstrom polishing of calcium fluoride optical VUV microlithography lens elements and preforms | Charles Michael Darcangelo, Harrie J. Stevens, Paul J. Williamson | 2002-04-23 |