Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6375551 | Angstrom polishing of calcium fluoride optical VUV microlithography lens elements and preforms | Robert Sabia, Harrie J. Stevens, Paul J. Williamson | 2002-04-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6375551 | Angstrom polishing of calcium fluoride optical VUV microlithography lens elements and preforms | Robert Sabia, Harrie J. Stevens, Paul J. Williamson | 2002-04-23 |