Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6375551 | Angstrom polishing of calcium fluoride optical VUV microlithography lens elements and preforms | Charles Michael Darcangelo, Robert Sabia, Harrie J. Stevens | 2002-04-23 |