Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465272 | Extreme ultraviolet soft x-ray projection lithographic method and mask devices | Claude L. Davis, Jr., Kenneth Edward Hrdina, Robert Sabia | 2002-10-15 |
| 6388745 | Detecting inclusions in transparent sheets | C. Charles Yu | 2002-05-14 |
| 6375551 | Angstrom polishing of calcium fluoride optical VUV microlithography lens elements and preforms | Charles Michael Darcangelo, Robert Sabia, Paul J. Williamson | 2002-04-23 |