Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465272 | Extreme ultraviolet soft x-ray projection lithographic method and mask devices | Kenneth Edward Hrdina, Robert Sabia, Harrie J. Stevens | 2002-10-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465272 | Extreme ultraviolet soft x-ray projection lithographic method and mask devices | Kenneth Edward Hrdina, Robert Sabia, Harrie J. Stevens | 2002-10-15 |