Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476399 | System and method for removing contaminant particles relative to an ion beam | Eric R. Harrington, Michael Graf, Robert D. Rathmell | 2002-11-05 |
| 6414329 | Method and system for microwave excitation of plasma in an ion beam guide | William F. DiVergilio, Frank Sinclair | 2002-07-02 |