WD

William F. DiVergilio

AT Axcelis Technologies: 1 patents #2 of 19Top 15%
📍 Beverly, MA: #7 of 34 inventorsTop 25%
🗺 Massachusetts: #1,783 of 6,384 inventorsTop 30%
Overall (2002): #92,205 of 266,432Top 35%
1
Patents 2002

Issued Patents 2002

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6414329 Method and system for microwave excitation of plasma in an ion beam guide Victor M. Benveniste, Frank Sinclair 2002-07-02