RR

Robert D. Rathmell

AT Axcelis Technologies: 1 patents #2 of 19Top 15%
📍 Madison, WI: #91 of 314 inventorsTop 30%
🗺 Wisconsin: #910 of 3,225 inventorsTop 30%
Overall (2002): #126,440 of 266,432Top 50%
1
Patents 2002

Issued Patents 2002

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6476399 System and method for removing contaminant particles relative to an ion beam Eric R. Harrington, Victor M. Benveniste, Michael Graf 2002-11-05