EH

Eric R. Harrington

AT Axcelis Technologies: 1 patents #2 of 19Top 15%
📍 Ipswich, MA: #7 of 17 inventorsTop 45%
🗺 Massachusetts: #1,783 of 6,384 inventorsTop 30%
Overall (2002): #223,333 of 266,432Top 85%
1
Patents 2002

Issued Patents 2002

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6476399 System and method for removing contaminant particles relative to an ion beam Victor M. Benveniste, Michael Graf, Robert D. Rathmell 2002-11-05