Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6490033 | Method of thin film process control and calibration standard for optical profilometry step height measurement | David Coult, Gustav E. Derkits, Jr., Ranjani Muthiah, Sonja Radelow | 2002-12-03 |
| 6437868 | In-situ automated contactless thickness measurement for wafer thinning | David Coult, Duane Donald Wendling, Charles Lentz, Bryan P. Segner, Gustav E. Derkits, Jr. +1 more | 2002-08-20 |