Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6490033 | Method of thin film process control and calibration standard for optical profilometry step height measurement | David Coult, Gustav E. Derkits, Jr., Franklin Roy Dietz, Sonja Radelow | 2002-12-03 |