Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475854 | Method of forming metal electrodes | Annabel Nickles, Xiaoliang Jin, Deepak Upadhyaya, Yaxin Wang | 2002-11-05 |
| 6454860 | Deposition reactor having vaporizing, mixing and cleaning capabilities | Craig Metzner, Turgut Sahin, Gregory Redinbo, Patricia M. Liu | 2002-09-24 |
| 6387761 | Anneal for enhancing the electrical characteristic of semiconductor devices | Wong-Cheng Shih, Randall S. Urdahl, Turgut Sahin | 2002-05-14 |
| 6337289 | Method and apparatus for integrating a metal nitride film in a semiconductor device | Turgut Sahin | 2002-01-08 |