Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6456482 | Microelectronic capacitor with capacitor plate layer formed of tungsten rich tungsten oxide material | Tai-Bor Wu, Chich-Shang Chang | 2002-09-24 |
| 6436787 | Method of forming crown-type MIM capacitor integrated with the CU damascene process | Tzyh-Cheang Lee, Wenchi Ting, Chih-Hsien Lin, Shyh-Chyi Wong | 2002-08-20 |
| 6387761 | Anneal for enhancing the electrical characteristic of semiconductor devices | Pravin K. Narwankar, Randall S. Urdahl, Turgut Sahin | 2002-05-14 |