Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6454860 | Deposition reactor having vaporizing, mixing and cleaning capabilities | Craig Metzner, Turgut Sahin, Pravin K. Narwankar, Patricia M. Liu | 2002-09-24 |
| 6374150 | Method and apparatus for monitoring and/or end point detecting a process | Jallepally Ravi, Michael Rivkin | 2002-04-16 |