Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475335 | RF plasma reactor with hybrid conductor and multi-radius dome ceiling | Gerald Yin, Diana Xiabing Ma, Peter Loewenhardt, Allen Zhao, Hiroji Hanawa | 2002-11-05 |
| 6402885 | Magnetically enhanced inductively coupled plasma reactor with magnetically confined plasma | Peter Loewenhardt, Gerald Yin | 2002-06-11 |