Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475335 | RF plasma reactor with hybrid conductor and multi-radius dome ceiling | Gerald Yin, Peter Loewenhardt, Philip M. Salzman, Allen Zhao, Hiroji Hanawa | 2002-11-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475335 | RF plasma reactor with hybrid conductor and multi-radius dome ceiling | Gerald Yin, Peter Loewenhardt, Philip M. Salzman, Allen Zhao, Hiroji Hanawa | 2002-11-05 |