Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451703 | Magnetically enhanced plasma etch process using a heavy fluorocarbon etching gas | Takehiko Komatsu, Hongqing Shan, Keji Horioka, Bryan Pu | 2002-09-17 |
| 6403491 | Etch method using a dielectric etch chamber with expanded process window | Judy Wang, Takehiko Komatsu, Bryan Pu, Kenny L. Doan, Claes Bjorkman +4 more | 2002-06-11 |