Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451703 | Magnetically enhanced plasma etch process using a heavy fluorocarbon etching gas | Jingbao Liu, Takehiko Komatsu, Hongqing Shan, Bryan Pu | 2002-09-17 |
KH
Keji Horioka
Overall (2002): #176,459 of 266,432Top 70%
1
Patents 2002