Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451179 | Method and apparatus for enhancing sidewall coverage during sputtering in a chamber having an inductively coupled plasma | Zheng Xu | 2002-09-17 |
| 6383915 | Tailoring of a wetting/barrier layer to reduce electromigration in an aluminum interconnect | Jingang Su, Zhang Xu, Fusen Chen | 2002-05-07 |
| 6368880 | Barrier applications for aluminum planarization | Shri Singhvi, Suraj Rengarajan, Peijun Ding | 2002-04-09 |