Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368880 | Barrier applications for aluminum planarization | Shri Singhvi, Peijun Ding, Gongda Yao | 2002-04-09 |
| 6346489 | Precleaning process for metal plug that minimizes damage to low-&kgr; dielectric | Barney M. Cohen, Kenny King-Tai Ngan | 2002-02-12 |