Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6454919 | Physical vapor deposition apparatus with deposition and DC target power control | Arvind Sundarrajan | 2002-09-24 |
| 6426282 | Method of forming solder bumps on a semiconductor wafer | Shankarram Athreya, Kenny King-Tai Ngan, Lisa Yang | 2002-07-30 |
| 6375743 | Method for improved chamber bake-out and cool-down | Arvind Sundarrajan, Peijun Ding | 2002-04-23 |