Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458251 | Pressure modulation method to obtain improved step coverage of seed layer | Darryl Angelo, Peijun Ding, Barry Chin, Imran Hasim | 2002-10-01 |
| 6454919 | Physical vapor deposition apparatus with deposition and DC target power control | Dinesh Saigal | 2002-09-24 |
| 6375743 | Method for improved chamber bake-out and cool-down | Dinesh Saigal, Peijun Ding | 2002-04-23 |
| 6376807 | Enhanced cooling IMP coil support | Richard Hong, James Tsung, Gunnar Vatvedt, Peijun Ding | 2002-04-23 |