Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492257 | Water vapor plasma for effective low-k dielectric resist stripping | Jeffrey A. Shields, Lu You | 2002-12-10 |
| 6431182 | Plasma treatment for polymer removal after via etch | Mark S. Chang, Angela T. Hui | 2002-08-13 |