Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479309 | Method and apparatus for determining process layer conformality | — | 2002-11-12 |
| 6458610 | Method and apparatus for optical film stack fault detection | Kevin R. Lensing, James Broc Stirton | 2002-10-01 |
| 6426262 | Method of analyzing the effects of shadowing of angled halo implants | Mark B. Fuselier, Jon D. Cheek, Frederick N. Hause | 2002-07-30 |