Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6464563 | Method and apparatus for detecting dishing in a polished layer | — | 2002-10-15 |
| 6458610 | Method and apparatus for optical film stack fault detection | Marilyn I. Wright, James Broc Stirton | 2002-10-01 |
| 6451700 | Method and apparatus for measuring planarity of a polished layer | James Broc Stirton | 2002-09-17 |
| 6433871 | Method of using scatterometry measurements to determine and control gate electrode profiles | James Broc Stirton | 2002-08-13 |
| 6383824 | Method of using scatterometry measurements to control deposition processes | — | 2002-05-07 |