Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479200 | Method of controlling stepper process parameters based upon scatterometric measurements of DICD features | — | 2002-11-12 |
| 6458605 | Method and apparatus for controlling photolithography overlay registration | — | 2002-10-01 |
| 6458610 | Method and apparatus for optical film stack fault detection | Kevin R. Lensing, Marilyn I. Wright | 2002-10-01 |
| 6451700 | Method and apparatus for measuring planarity of a polished layer | Kevin R. Lensing | 2002-09-17 |
| 6433871 | Method of using scatterometry measurements to determine and control gate electrode profiles | Kevin R. Lensing | 2002-08-13 |
| 6383888 | Method and apparatus for selecting wafer alignment marks based on film thickness variation | — | 2002-05-07 |