Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475874 | Damascene NiSi metal gate high-k transistor | Qi Xiang, Paul R. Besser, Matthew S. Buynoski, Paul L. King, Eric N. Paton | 2002-11-05 |
| 6465309 | Silicide gate transistors | Qi Xiang, Paul R. Besser, Matthew S. Buynoski, Paul L. King, Eric N. Paton | 2002-10-15 |
| 6458679 | Method of making silicide stop layer in a damascene semiconductor structure | Eric N. Paton, Paul R. Besser, Matthew S. Buynoski, Qi Xiang, Paul L. King | 2002-10-01 |
| 6387804 | Passivation of sidewall spacers using ozonated water | — | 2002-05-14 |
| 6372644 | Hydrogen passivated silicon nitride spacers for reduced nickel silicide bridging | Paul L. King | 2002-04-16 |
| 6368963 | Passivation of semiconductor device surfaces using an iodine/ethanol solution | — | 2002-04-09 |
| 6368950 | Silicide gate transistors | Qi Xiang, Paul R. Besser, Matthew S. Buynoski, Paul L. King, Eric N. Paton | 2002-04-09 |
| 6342414 | Damascene NiSi metal gate high-k transistor | Qi Xiang, Paul R. Besser, Matthew S. Buynoski, Paul L. King, Eric N. Paton | 2002-01-29 |