Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5639542 | Sub-ground plane for micromachined device | Richard S. Payne, Stephen F. Bart | 1997-06-17 |
| 5640039 | Conductive plane beneath suspended microstructure | Kevin Hin-Leung Chau, Richard S. Payne, Yang Zhao, Theresa A. Core, Steven J. Sherman | 1997-06-17 |