Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5694740 | Micromachined device packaged to reduce stiction | John R. Martin | 1997-12-09 |
| 5679436 | Micromechanical structure with textured surface and method for making same | — | 1997-10-21 |
| 5640039 | Conductive plane beneath suspended microstructure | Kevin Hin-Leung Chau, Roger T. Howe, Richard S. Payne, Theresa A. Core, Steven J. Sherman | 1997-06-17 |
| 5621157 | Method and circuitry for calibrating a micromachined sensor | Richard S. Payne | 1997-04-15 |