Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5640039 | Conductive plane beneath suspended microstructure | Kevin Hin-Leung Chau, Roger T. Howe, Richard S. Payne, Yang Zhao, Steven J. Sherman | 1997-06-17 |
| 5620931 | Methods for fabricating monolithic device containing circuitry and suspended microstructure | Robert W. K. Tsang | 1997-04-15 |