Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5639542 | Sub-ground plane for micromachined device | Roger T. Howe, Stephen F. Bart | 1997-06-17 |
| 5640039 | Conductive plane beneath suspended microstructure | Kevin Hin-Leung Chau, Roger T. Howe, Yang Zhao, Theresa A. Core, Steven J. Sherman | 1997-06-17 |
| 5621157 | Method and circuitry for calibrating a micromachined sensor | Yang Zhao | 1997-04-15 |