Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5683558 | Anode structure for magnetron sputtering systems | Russell J. Hill, John L. Vossen, Jr., Stephen C. Schulz | 1997-11-04 |
| 5645699 | Dual cylindrical target magnetron with multiple anodes | — | 1997-07-08 |
| 5616225 | Use of multiple anodes in a magnetron for improving the uniformity of its plasma | Richard Newcomb, Terry A. Trumbly, Stephen C. Schulz | 1997-04-01 |