Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5683558 | Anode structure for magnetron sputtering systems | Peter A. Sieck, Russell J. Hill, Stephen C. Schulz | 1997-11-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5683558 | Anode structure for magnetron sputtering systems | Peter A. Sieck, Russell J. Hill, Stephen C. Schulz | 1997-11-04 |