Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5683558 | Anode structure for magnetron sputtering systems | Peter A. Sieck, Russell J. Hill, John L. Vossen, Jr. | 1997-11-04 |
| 5616225 | Use of multiple anodes in a magnetron for improving the uniformity of its plasma | Peter A. Sieck, Richard Newcomb, Terry A. Trumbly | 1997-04-01 |