Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5616225 | Use of multiple anodes in a magnetron for improving the uniformity of its plasma | Peter A. Sieck, Richard Newcomb, Stephen C. Schulz | 1997-04-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5616225 | Use of multiple anodes in a magnetron for improving the uniformity of its plasma | Peter A. Sieck, Richard Newcomb, Stephen C. Schulz | 1997-04-01 |