Issued Patents 1997
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5683591 | Process for producing surface micromechanical structures | — | 1997-11-04 |
| 5646347 | Suspension for micromechanical structure and micromechanical acceleration sensor | Kurt Weiblen, Bernhard Elsner | 1997-07-08 |
| 5631422 | Sensor comprising multilayer substrate | Peter Sulzberger, Bernhard Elsner, Markus Lutz | 1997-05-20 |
| 5627317 | Acceleration sensor | Wolfgang Buchholtz, Markus Lutz | 1997-05-06 |
| 5616514 | Method of fabricating a micromechanical sensor | Joerg Muchow, Horst Muenzel, Winfried Waldvogel | 1997-04-01 |
| 5616523 | Method of manufacturing sensor | Gerhard Benz, Jiri Marek, Frank Bantien, Horst Muenzel, Franz Laermer +1 more | 1997-04-01 |