Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5646347 | Suspension for micromechanical structure and micromechanical acceleration sensor | Kurt Weiblen, Michael Offenberg | 1997-07-08 |
| 5631422 | Sensor comprising multilayer substrate | Peter Sulzberger, Michael Offenberg, Markus Lutz | 1997-05-20 |