Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5616514 | Method of fabricating a micromechanical sensor | Horst Muenzel, Michael Offenberg, Winfried Waldvogel | 1997-04-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5616514 | Method of fabricating a micromechanical sensor | Horst Muenzel, Michael Offenberg, Winfried Waldvogel | 1997-04-01 |