Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5703287 | Measuring element for a flow sensor | Christoph Treutler, Rolf Benz, Steffen Schmidt, Eckart Reihlen, Andreas Lock | 1997-12-30 |
| 5629538 | Semiconductor sensor having a protective layer | Uwe Lipphardt, Guenther Findler, Helmut Baumann | 1997-05-13 |
| 5616514 | Method of fabricating a micromechanical sensor | Joerg Muchow, Michael Offenberg, Winfried Waldvogel | 1997-04-01 |
| 5616523 | Method of manufacturing sensor | Gerhard Benz, Jiri Marek, Frank Bantien, Franz Laermer, Michael Offenberg +1 more | 1997-04-01 |